JPH036580Y2 - - Google Patents
Info
- Publication number
- JPH036580Y2 JPH036580Y2 JP19317086U JP19317086U JPH036580Y2 JP H036580 Y2 JPH036580 Y2 JP H036580Y2 JP 19317086 U JP19317086 U JP 19317086U JP 19317086 U JP19317086 U JP 19317086U JP H036580 Y2 JPH036580 Y2 JP H036580Y2
- Authority
- JP
- Japan
- Prior art keywords
- cargo
- opening
- load
- clean room
- cleanliness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 claims description 19
- 239000000428 dust Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19317086U JPH036580Y2 (en]) | 1986-12-15 | 1986-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19317086U JPH036580Y2 (en]) | 1986-12-15 | 1986-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100425U JPS63100425U (en]) | 1988-06-29 |
| JPH036580Y2 true JPH036580Y2 (en]) | 1991-02-19 |
Family
ID=31148944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19317086U Expired JPH036580Y2 (en]) | 1986-12-15 | 1986-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036580Y2 (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2936030B2 (ja) * | 1992-04-21 | 1999-08-23 | 日立機電工業株式会社 | 袋詰スクリーン渣の移載装置 |
| JP5277572B2 (ja) * | 2007-06-26 | 2013-08-28 | 大日本印刷株式会社 | 板状物の保管移送システムおよび板状物の保管移送方法 |
| JP5431187B2 (ja) * | 2010-01-27 | 2014-03-05 | 株式会社富士精工本社 | 貸金庫装置における金庫ボックスの搬送装置 |
| JP5707466B2 (ja) * | 2013-10-03 | 2015-04-30 | 株式会社富士精工本社 | 貸金庫装置における金庫ボックスの搬送装置 |
-
1986
- 1986-12-15 JP JP19317086U patent/JPH036580Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63100425U (en]) | 1988-06-29 |
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